On modelling thermal oxidation of Silicon I: theory
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Publication:4493651
DOI<341::AID-NME774>3.0.CO;2-Z 10.1002/(SICI)1097-0207(20000110/30)47:1/3<341::AID-NME774>3.0.CO;2-ZzbMath0988.74010OpenAlexW2009017033MaRDI QIDQ4493651
Thomas J. R. Hughes, Vinay S. Rao
Publication date: 22 July 2002
Full work available at URL: https://doi.org/10.1002/(sici)1097-0207(20000110/30)47:1/3<341::aid-nme774>3.0.co;2-z
siliconviscoelasticitymomentum balanceinterface motionconservation equationsthermal oxidationsilicon dioxidediffusion-reaction processlarge expansionmass balance lawoxidant transportsplit of deformation gradientstress equilibration process
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Cites Work
- Variational and projection methods for the volume constraint in finite deformation elasto-plasticity
- On a fully three-dimensional finite-strain viscoelastic damage model: Formulation and computational aspects
- A framework for finite strain elastoplasticity based on maximum plastic dissipation and the multiplicative decomposition. I: Continuum formulation
- A framework for finite strain elastoplasticity based on maximum plastic dissipation and the multiplicative decomposition. II: Computational aspects
- Decomposition of deformation and representation of the free energy function for isotropic thermoelastic solids
- Computational inelasticity
- A new viscoelastic constitutive model for continuous media at finite thermomechanical changes
- An introduction to continuum mechanics