On modelling thermal oxidation of Silicon I: theory (Q4493651)
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scientific article; zbMATH DE number 1487158
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | On modelling thermal oxidation of Silicon I: theory |
scientific article; zbMATH DE number 1487158 |
Statements
22 July 2002
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viscoelasticity
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diffusion-reaction process
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stress equilibration process
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thermal oxidation
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silicon
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conservation equations
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mass balance law
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oxidant transport
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interface motion
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momentum balance
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large expansion
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split of deformation gradient
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silicon dioxide
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On modelling thermal oxidation of Silicon I: theory (English)
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