Design framework for high-performance optimal sampled-data control with application to a wafer stage (Q5758317): Difference between revisions
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Revision as of 23:14, 5 March 2024
scientific article; zbMATH DE number 5186149
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Design framework for high-performance optimal sampled-data control with application to a wafer stage |
scientific article; zbMATH DE number 5186149 |
Statements
Design framework for high-performance optimal sampled-data control with application to a wafer stage (English)
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3 September 2007
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control design
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high-performance sampled-data systems
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system identification techniques
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