Robust control and data‐driven tuning of a hybrid integrator‐gain system with applications to wafer scanners (Q5222723): Difference between revisions
From MaRDI portal
Set profile property. |
Set OpenAlex properties. |
||
| Property / full work available at URL | |||
| Property / full work available at URL: https://doi.org/10.1002/acs.2888 / rank | |||
Normal rank | |||
| Property / OpenAlex ID | |||
| Property / OpenAlex ID: W2801698210 / rank | |||
Normal rank | |||
Revision as of 19:50, 19 March 2024
scientific article; zbMATH DE number 7078760
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Robust control and data‐driven tuning of a hybrid integrator‐gain system with applications to wafer scanners |
scientific article; zbMATH DE number 7078760 |
Statements
Robust control and data‐driven tuning of a hybrid integrator‐gain system with applications to wafer scanners (English)
0 references
10 July 2019
0 references
circle criterion
0 references
data-based optimization
0 references
motion control
0 references
nonlinear integrator
0 references
