Robust control and data-driven tuning of a hybrid integrator-gain system with applications to wafer scanners

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Publication:5222723

DOI10.1002/ACS.2888zbMATH Open1417.93121OpenAlexW2801698210WikidataQ129894062 ScholiaQ129894062MaRDI QIDQ5222723FDOQ5222723


Authors: M. F. Heertjes, N. Irigoyen Perdiguero, Daniel Andreas Deenen Edit this on Wikidata


Publication date: 10 July 2019

Published in: International Journal of Adaptive Control and Signal Processing (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/acs.2888




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