Robust control and data-driven tuning of a hybrid integrator-gain system with applications to wafer scanners

DOI10.1002/ACS.2888MaRDI QIDQ5222723zbMATH OpenOpenAlexWikidataFDO

Authors M. F. Heertjes, N. Irigoyen Perdiguero, Daniel Andreas Deenen

Publication date 10 July 2019

Published in International Journal of Adaptive Control and Signal Processing (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1002/acs.2888

zbMATH Keywords

motion controlcircle criteriondata-based optimizationnonlinear integrator

Mathematics Subject Classification ID

Sensitivity (robustness) (93B35) Control/observation systems governed by partial differential equations (93C20) Application models in control theory (93C95) Robust stability (93D09) Frequency-response methods in control theory (93C80)

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Cites work

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Cited in

(3)

• Data‐driven direct automatic tuning scheme for fixed‐structure digital controllers of hybrid systems
• Stability and performance analysis of hybrid integrator-gain systems: a linear matrix inequality approach
• Editorial for the special issue on learning-based adaptive control: theory and applications

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