Robust control and data‐driven tuning of a hybrid integrator‐gain system with applications to wafer scanners

DOI10.1002/acs.2888zbMath1417.93121MaRDI QIDQ5222723

Daniel Andreas Deenen, M. F. Heertjes, N. Irigoyen Perdiguero

Publication date: 10 July 2019

Published in: International Journal of Adaptive Control and Signal Processing (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/acs.2888

zbMATH Keywords

circle criterion; motion control; data-based optimization; nonlinear integrator

Mathematics Subject Classification ID

93B35: Sensitivity (robustness)

93C20: Control/observation systems governed by partial differential equations

93C95: Application models in control theory

93C80: Frequency-response methods in control theory

93D09: Robust stability

Related Items

Editorial for the Special Issue on Learning‐based Adaptive Control: Theory and Applications, Stability and performance analysis of hybrid integrator-gain systems: a linear matrix inequality approach

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