Robust control and data-driven tuning of a hybrid integrator-gain system with applications to wafer scanners (Q5222723)
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scientific article; zbMATH DE number 7078760
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| English | Robust control and data-driven tuning of a hybrid integrator-gain system with applications to wafer scanners |
scientific article; zbMATH DE number 7078760 |
Statements
Robust control and data‐driven tuning of a hybrid integrator‐gain system with applications to wafer scanners (English)
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10 July 2019
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circle criterion
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data-based optimization
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motion control
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nonlinear integrator
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0.6758139133453369
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0.6694692373275757
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0.664146900177002
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0.6570641398429871
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0.6561142206192017
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