Design framework for high-performance optimal sampled-data control with application to a wafer stage (Q5758317)
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scientific article; zbMATH DE number 5186149
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| English | Design framework for high-performance optimal sampled-data control with application to a wafer stage |
scientific article; zbMATH DE number 5186149 |
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Design framework for high-performance optimal sampled-data control with application to a wafer stage (English)
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3 September 2007
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control design
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high-performance sampled-data systems
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system identification techniques
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0.7602531909942627
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0.757942259311676
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0.7501932382583618
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0.7485039830207825
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0.74737149477005
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