Position Control in Lithographic Equipment [Applications of Control]

DOI10.1109/MCS.2011.941882zbMath1395.93412MaRDI QIDQ5375745

Hans Butler

Publication date: 14 September 2018

Published in: IEEE Control Systems (Search for Journal in Brave)

Mathematics Subject Classification ID

Application models in control theory (93C95) Geometric optics (78A05)

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