A constrained linear quadratic optimization algorithm toward jerk-decoupling cartridge design
DOI10.1016/J.JFRANKLIN.2016.10.020zbMATH Open1355.90058OpenAlexW2533475091MaRDI QIDQ509520FDOQ509520
Authors: Yong-Cai Geng, Sumit K. Garg
Publication date: 9 February 2017
Published in: Journal of the Franklin Institute (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.jfranklin.2016.10.020
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- Position Control in Lithographic Equipment [Applications of Control]
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