Design framework for high-performance optimal sampled-data control with application to a wafer stage

From MaRDI portal
Publication:5758317

DOI10.1080/00207170701216329zbMath1124.93017OpenAlexW2114450850MaRDI QIDQ5758317

No author found.

Publication date: 3 September 2007

Published in: International Journal of Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00207170701216329




Related Items (8)


Uses Software


Cites Work


This page was built for publication: Design framework for high-performance optimal sampled-data control with application to a wafer stage