Design framework for high-performance optimal sampled-data control with application to a wafer stage

DOI10.1080/00207170701216329zbMATH Open1124.93017OpenAlexW2114450850MaRDI QIDQ5758317FDOQ5758317

Authors:

Publication date: 3 September 2007

Published in: International Journal of Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00207170701216329

Recommendations

• H_∞optimal sampled-data control in continuous time systems
• Optimal sampled-data control systems
• Sampled-data control of continuous-time systems with an \(H_ \infty\) optimality criterion
• L/sub 1/ analysis and design of sampled-data systems
• H/sub 2/-optimal sampled-data control

zbMATH Keywords

control designsystem identification techniqueshigh-performance sampled-data systems

Mathematics Subject Classification ID

System identification (93B30) Eigenvalue problems (93B60) Sampled-data control/observation systems (93C57)

Cites Work

• Zeros of sampled systems
• State-space solutions to standard H/sub 2/ and H/sub infinity / control problems
• A loop-shaping design procedure using H/sub infinity / synthesis
• Intersample and finite wordlength effects in sampled-data problems
• A general framework for linear periodic systems with applications to H/sup infinity / sampled-data control
• Properties of sensitivity and complementary sensitivity functions in single-input single-output digital control systems
• The \({\mathcal H}^ 2\) problem for sampled-data systems
• A lifting technique for linear periodic systems with applications to sampled-data control
• Approximation of frequency response for sampled-data control systems
• Frequency response of sampled-data systems
• Multivariable feedback design: Concepts for a classical/modern synthesis
• A new approach to the discretization of continuous-time controllers
• Frequency response of sampled-data systems
• Inherent design limitations for linear sampled-data feedback systems
• State-space approach to discrete-time,_ℋ∞control
• Frequency domain sensitivity functions for continuous time systems under sampled data control
• A four-block problem for \(H_{\infty{}}\) design: Properties and applications
• Minimization of the L/sup infinity /-induced norm for sampled-data systems
• Controller Discretization: A Gap Metric Framework for Analysis and Synthesis
• A bode sensitivity integral for linear time-periodic systems

Cited In (11)

• Optimally conditioned instrumental variable approach for frequency-domain system identification
• Analysis of sampled-data hybrid integrator-gain systems: a discrete-time approach
• Title not available (Why is that?)
• Intersample optimization in a sampled-data control system using the redundancy of a dual-rate system
• Robust control and data-driven tuning of a hybrid integrator-gain system with applications to wafer scanners
• Comparing multivariable uncertain model structures for data‐driven robust control: Visualization and application to a continuously variable transmission
• Suppressing intersample behavior in iterative learning control
• Beyond equidistant sampling for performance and cost: a loop-shaping approach applied to a motion system
• Controlling aliased dynamics in motion systems? An identification for sampled-data control approach
• On interval tracking performance evaluation and practical varying sampling ILC
• System identification for achieving robust performance

Uses Software

• Mu Analysis and Synthesis Toolbox

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