Design framework for high-performance optimal sampled-data control with application to a wafer stage

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Publication:5758317

DOI10.1080/00207170701216329zbMATH Open1124.93017OpenAlexW2114450850MaRDI QIDQ5758317FDOQ5758317

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Publication date: 3 September 2007

Published in: International Journal of Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00207170701216329





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