Arbitrary-pressure chemical vapor deposition modeling using direct simulation Monte Carlo with nonlinear surface chemistry (Q1879617): Difference between revisions
From MaRDI portal
Latest revision as of 20:56, 6 June 2024
scientific article
Language | Label | Description | Also known as |
---|---|---|---|
English | Arbitrary-pressure chemical vapor deposition modeling using direct simulation Monte Carlo with nonlinear surface chemistry |
scientific article |
Statements
Arbitrary-pressure chemical vapor deposition modeling using direct simulation Monte Carlo with nonlinear surface chemistry (English)
0 references
23 September 2004
0 references
0 references
0 references