A methodology for fast finite element modeling of electrostatically actuated MEMS (Q3623185): Difference between revisions
From MaRDI portal
Set OpenAlex properties. |
ReferenceBot (talk | contribs) Changed an Item |
||
| Property / cites work | |||
| Property / cites work: Q3149246 / rank | |||
Normal rank | |||
| Property / cites work | |||
| Property / cites work: A simple method for automatic update of finite element meshes / rank | |||
Normal rank | |||
| Property / cites work | |||
| Property / cites work: Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives / rank | |||
Normal rank | |||
Latest revision as of 12:17, 1 July 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A methodology for fast finite element modeling of electrostatically actuated MEMS |
scientific article |
Statements
A methodology for fast finite element modeling of electrostatically actuated MEMS (English)
0 references
16 April 2009
0 references
MEMS
0 references
modeling
0 references
FEM
0 references
electrostatic actuation
0 references
