Non-uniform, axisymmetric misfit strain in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures (Q608625): Difference between revisions
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| Property / cites work: Thin Film Materials / rank | |||
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| Property / cites work: Thermoelastic analysis of periodic thin lines deposited on a substrate / rank | |||
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| Property / cites work: Geometrically nonlinear stress-deflection relations for thin film/substrate systems / rank | |||
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| Property / cites work: Bifurcation in isotropic thin film/substrate plates / rank | |||
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| Property / cites work: Substrate curvature due to thin film mismatch strain in the nonlinear deformation range / rank | |||
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Latest revision as of 13:13, 3 July 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Non-uniform, axisymmetric misfit strain in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures |
scientific article |
Statements
Non-uniform, axisymmetric misfit strain in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures (English)
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25 November 2010
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non-uniform misfit strain
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non-uniform wafer curvatures
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stress-curvature relations
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non-local effects
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interfacial shears
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