Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps (Q1658038): Difference between revisions
From MaRDI portal
Set OpenAlex properties. |
ReferenceBot (talk | contribs) Changed an Item |
||
Property / cites work | |||
Property / cites work: Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS / rank | |||
Normal rank | |||
Property / cites work | |||
Property / cites work: Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems / rank | |||
Normal rank | |||
Property / cites work | |||
Property / cites work: Elastic-Plastic Contact Analysis of a Sphere and a Rigid Flat / rank | |||
Normal rank | |||
Property / cites work | |||
Property / cites work: Deformation of silicon - insights from microcompression testing at 25-500\(^\circ \)C / rank | |||
Normal rank |
Latest revision as of 08:42, 16 July 2024
scientific article
Language | Label | Description | Also known as |
---|---|---|---|
English | Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps |
scientific article |
Statements
Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps (English)
0 references
14 August 2018
0 references
MEMS sensors
0 references
stiction
0 references
contact model
0 references
0 references