Size dependent dynamic behavior of electrostatically actuated microbridges (Q1626325): Difference between revisions

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Revision as of 11:51, 17 July 2024

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Size dependent dynamic behavior of electrostatically actuated microbridges
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    Size dependent dynamic behavior of electrostatically actuated microbridges (English)
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    27 November 2018
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    size dependent theory
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    microresonators
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    analytical method
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    nonlinear finite element simulation
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