Size dependent dynamic behavior of electrostatically actuated microbridges

DOI10.1016/j.ijengsci.2016.11.007zbMath1423.74640MaRDI QIDQ1626325

Y. Aharonov

Publication date: 27 November 2018

Published in: International Journal of Engineering Science (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.ijengsci.2016.11.007

zbMATH Keywords

analytical method; microresonators; nonlinear finite element simulation; size dependent theory

Mathematics Subject Classification ID

74M05: Control, switches and devices (``smart materials) in solid mechanics

74S05: Finite element methods applied to problems in solid mechanics

74M25: Micromechanics of solids

74F15: Electromagnetic effects in solid mechanics