Size dependent dynamic behavior of electrostatically actuated microbridges (Q1626325)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Size dependent dynamic behavior of electrostatically actuated microbridges |
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Size dependent dynamic behavior of electrostatically actuated microbridges (English)
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27 November 2018
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size dependent theory
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microresonators
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analytical method
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nonlinear finite element simulation
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