Charge distribution on narrow MEMS beams of nearly square cross‐section (Q5302260)
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scientific article; zbMATH DE number 5485946
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Charge distribution on narrow MEMS beams of nearly square cross‐section |
scientific article; zbMATH DE number 5485946 |
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Charge distribution on narrow MEMS beams of nearly square cross‐section (English)
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6 January 2009
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charge distribution
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microelectromechanical systems
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narrow beams
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boundary element method
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