Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in (Q999955)
From MaRDI portal
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in |
scientific article |
Statements
Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in (English)
0 references
4 February 2009
0 references
electromechanical coupling
0 references
finite element
0 references
micro-systems
0 references
dynamics
0 references
pull-in
0 references
