Flatness-based adaptive fuzzy control of electrostatically actuated MEMS using output feedback (Q1677870)

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Flatness-based adaptive fuzzy control of electrostatically actuated MEMS using output feedback
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    Flatness-based adaptive fuzzy control of electrostatically actuated MEMS using output feedback (English)
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    13 November 2017
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    electrostatically actuated MEMS
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    adaptive fuzzy control
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    neurofuzzy approximation
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    state observers
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    Lyapunov stability
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    \(H_\infty\) tracking performance
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    Riccati equations
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