LATERAL-FLEXURAL AND TORSIONAL VIBRATIONS OF FLEXIBLE RING FOR ELECTROMECHANICAL INTEGRATED ELECTROSTATIC HARMONIC ACTUATOR (Q2845988)
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English | LATERAL-FLEXURAL AND TORSIONAL VIBRATIONS OF FLEXIBLE RING FOR ELECTROMECHANICAL INTEGRATED ELECTROSTATIC HARMONIC ACTUATOR |
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LATERAL-FLEXURAL AND TORSIONAL VIBRATIONS OF FLEXIBLE RING FOR ELECTROMECHANICAL INTEGRATED ELECTROSTATIC HARMONIC ACTUATOR (English)
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5 September 2013
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electromechanical integrated
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actuator
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vibration
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MEMS
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