On modelling thermal oxidation of Silicon I: theory (Q4493651)

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scientific article; zbMATH DE number 1487158
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On modelling thermal oxidation of Silicon I: theory
scientific article; zbMATH DE number 1487158

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    22 July 2002
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    viscoelasticity
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    diffusion-reaction process
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    stress equilibration process
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    thermal oxidation
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    silicon
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    conservation equations
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    mass balance law
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    oxidant transport
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    interface motion
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    momentum balance
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    large expansion
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    split of deformation gradient
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    silicon dioxide
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    On modelling thermal oxidation of Silicon I: theory (English)
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