LATERAL-FLEXURAL AND TORSIONAL VIBRATIONS OF FLEXIBLE RING FOR ELECTROMECHANICAL INTEGRATED ELECTROSTATIC HARMONIC ACTUATOR (Q2845988)

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LATERAL-FLEXURAL AND TORSIONAL VIBRATIONS OF FLEXIBLE RING FOR ELECTROMECHANICAL INTEGRATED ELECTROSTATIC HARMONIC ACTUATOR
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    LATERAL-FLEXURAL AND TORSIONAL VIBRATIONS OF FLEXIBLE RING FOR ELECTROMECHANICAL INTEGRATED ELECTROSTATIC HARMONIC ACTUATOR (English)
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    5 September 2013
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    electromechanical integrated
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    actuator
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    vibration
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    MEMS
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