Predictions of strength in MEMS components with defects --- a novel experimental--theoretical approach (Q1777193)

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Predictions of strength in MEMS components with defects --- a novel experimental--theoretical approach
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    Predictions of strength in MEMS components with defects --- a novel experimental--theoretical approach (English)
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    12 May 2005
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    Thin films
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    Fracture
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    Strength
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    MEMS
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    Brittle materials
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