Predictions of strength in MEMS components with defects --- a novel experimental--theoretical approach (Q1777193)

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scientific article; zbMATH DE number 2168031
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    Predictions of strength in MEMS components with defects --- a novel experimental--theoretical approach
    scientific article; zbMATH DE number 2168031

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      Predictions of strength in MEMS components with defects --- a novel experimental--theoretical approach (English)
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      12 May 2005
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      Thin films
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      Fracture
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      Strength
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      MEMS
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      Brittle materials
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