A microsystem for the fracture characterization of polysilicon at the micro-scale (Q1949073)
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scientific article; zbMATH DE number 6157634
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| English | A microsystem for the fracture characterization of polysilicon at the micro-scale |
scientific article; zbMATH DE number 6157634 |
Statements
A microsystem for the fracture characterization of polysilicon at the micro-scale (English)
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25 April 2013
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microsystem
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polysilicon fracture
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mechanical testing
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cohesive crack simulation
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0.7500588893890381
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0.744780957698822
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0.6764214038848877
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0.6709667444229126
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