A microsystem for the fracture characterization of polysilicon at the micro-scale (Q1949073)

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A microsystem for the fracture characterization of polysilicon at the micro-scale
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    A microsystem for the fracture characterization of polysilicon at the micro-scale (English)
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    25 April 2013
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    microsystem
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    polysilicon fracture
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    mechanical testing
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    cohesive crack simulation
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