An analysis of the membrane deflection experiment used in the investigation of mechanical properties of freestanding submicron thin films (Q2459883)
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scientific article; zbMATH DE number 5209701
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| English | An analysis of the membrane deflection experiment used in the investigation of mechanical properties of freestanding submicron thin films |
scientific article; zbMATH DE number 5209701 |
Statements
An analysis of the membrane deflection experiment used in the investigation of mechanical properties of freestanding submicron thin films (English)
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8 November 2007
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Thin films
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MEMS materials
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fracture
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plasticity
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nanoscale testing
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0.7277751564979553
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0.7173818945884705
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0.7001549005508423
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0.6944817900657654
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0.6885201334953308
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