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- improvement at wet-etch tools 2016-11-10 Paper A novel approach to hedge and compensate the critical dimension variation of the developed-and-etched circuit patterns...10 bytes (15 words) - 00:48, 25 September 2023
- improvement at wet-etch tools 2016-11-10 Paper A novel approach to hedge and compensate the critical dimension variation of the developed-and-etched circuit patterns...10 bytes (15 words) - 00:59, 25 September 2023
- zbMATH Keywords genetic algorithms; makespan; sequencing optimisation; wet-etch tool Mathematics Subject Classification ID 90C90: Applications of mathematical...15 bytes (62 words) - 03:37, 30 January 2024
