Sequencing optimisation for makespan improvement at wet-etch tools

DOI10.1016/J.COR.2014.04.016MaRDI QIDQ337295zbMATH OpenOpenAlexFDO

Authors Anna Rotondo, Paul Young, John Geraghty

Publication date 10 November 2016

Published in Computers \& Operations Research (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.cor.2014.04.016

zbMATH Keywords

genetic algorithmsmakespansequencing optimisationwet-etch tool

Mathematics Subject Classification ID

Applications of mathematical programming (90C90)

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Cites work

• A genetic algorithm for multiple objective sequencing problems in mixed model assembly lines.
• Algorithms and Computation
• An algorithm for hoist scheduling problems
• Combinatorial landscapes
• Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots

Cited in

(1)

• Parallel machine scheduling with time constraints on machine qualifications

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