Sequencing optimisation for makespan improvement at wet-etch tools

DOI10.1016/J.COR.2014.04.016zbMATH Open1348.90670OpenAlexW2055934298MaRDI QIDQ337295FDOQ337295

Authors: Anna Rotondo, Paul Young, John Geraghty 

Publication date: 10 November 2016

Published in: Computers \& Operations Research (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.cor.2014.04.016

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zbMATH Keywords

genetic algorithmsmakespansequencing optimisationwet-etch tool

Mathematics Subject Classification ID

Applications of mathematical programming (90C90)

Cites Work

• Combinatorial landscapes
• A genetic algorithm for multiple objective sequencing problems in mixed model assembly lines.
• An algorithm for hoist scheduling problems
• Algorithms and Computation
• Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots

Cited In (1)

• Parallel machine scheduling with time constraints on machine qualifications

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