A fixed-grid approach for diffusion- and reaction-controlled wet chemical etching

DOI10.1016/J.IJHEATMASSTRANSFER.2004.12.033MaRDI QIDQ978152zbMATH OpenOpenAlexFDO

Authors J. Martínez

Publication date 24 June 2010

Published in International Journal of Heat and Mass Transfer (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.ijheatmasstransfer.2004.12.033

Mathematics Subject Classification ID

Diffusion (76R50) Stefan problems, phase changes, etc. (80A22) Finite volume methods applied to problems in fluid mechanics (76M12) Reaction effects in flows (76V05)

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(7)

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• Sequencing optimisation for makespan improvement at wet-etch tools
• Asymptotic analysis of a multi-component wet chemical etching model
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