scientific article; zbMATH DE number 4217735

MaRDI QIDQ3363940zbMATH OpenFDO

Authors I. V. Medvedev, G. A. Chechko, N. I. Khodakovskij, V. N. Sklepovoj

Publication date 1992

zbMATH Keywords

boundary value problemdiode plasmatronPoisson equationseries

Mathematics Subject Classification ID

PDEs in connection with fluid mechanics (35Q35) Diffusion (76R50) Reaction effects in flows (76V05)

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• ETCH PROFILE EVOLUTION IN LOW PRESSURE RF PLASMA WITH AXIAL MAGNETIC FIELD

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