Diffusion model of nonuniformity of reactive etching

DOI10.1007/BF02114041MaRDI QIDQ4272037zbMATH OpenOpenAlexFDO

Authors I. V. Medvedev, G. A. Chechko, N. I. Khodakovskij, V. N. Sklepovoj

Publication date 5 March 1996

Published in Journal of Mathematical Sciences (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/bf02114041

zbMATH Keywords

boundary value problemdiode plasmatronPoisson equationseries

Mathematics Subject Classification ID

PDEs in connection with fluid mechanics (35Q35) Diffusion (76R50) Reaction effects in flows (76V05)

Cited in

(1)

• scientific article; zbMATH DE number 4217735 (Why is no real title available?)

This page was built for publication: Diffusion model of nonuniformity of reactive etching

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q4272037)