scientific article; zbMATH DE number 922732

MaRDI QIDQ4893264zbMATH OpenFDO

Authors J. C. jun. Bruch, J. M. Sloss, Chris A. Papadopoulos

Publication date 8 December 1996

zbMATH Keywords

iterative numerical schememanufacturing of microelectronic devicesnumerical resultsparallel computersemiconductor fabricationvariational inequalitywet chemical etching

Mathematics Subject Classification ID

Unilateral problems for linear parabolic equations and variational inequalities with linear parabolic operators (35K85) Existence theories for optimal control problems involving partial differential equations (49J20) Discrete approximations in optimal control (49M25) Numerical optimization and variational techniques (65K10) Parallel numerical computation (65Y05) Technical applications of optics and electromagnetic theory (78A55)

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