scientific article; zbMATH DE number 922732
zbMATH Open0853.65071MaRDI QIDQ4893264FDOQ4893264
Authors: J. C. jun. Bruch, J. M. Sloss, Chris A. Papadopoulos 
Publication date: 8 December 1996
Title of this publication is not available (Why is that?)
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numerical resultsvariational inequalityparallel computerwet chemical etchingiterative numerical schemesemiconductor fabricationmanufacturing of microelectronic devices
Numerical optimization and variational techniques (65K10) Parallel numerical computation (65Y05) Technical applications of optics and electromagnetic theory (78A55) Existence theories for optimal control problems involving partial differential equations (49J20) Discrete approximations in optimal control (49M25) Unilateral problems for linear parabolic equations and variational inequalities with linear parabolic operators (35K85)
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