Numerical solution of an etching problem

DOI10.1016/0021-9991(85)90145-7MaRDI QIDQ1071484zbMATH OpenOpenAlexFDO

Authors C. Cuvelier, C. Vuik

Publication date 1985

Published in Journal of Computational Physics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/0021-9991(85)90145-7

zbMATH Keywords

variational inequalitymoving grid methodwet chemical etching

Mathematics Subject Classification ID

Numerical optimization and variational techniques (65K10) Heat equation (35K05) Variational inequalities (49J40) Numerical solution of discretized equations for boundary value problems involving PDEs (65N22) Applications to the sciences (65Z05) Chemical kinetics in thermodynamics and heat transfer (80A30)

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Cited in

(16)

• A new semi-analytical method for phase transformations in binary alloys
• Modeling two-dimensional diffusion-controlled wet chemical etching using a total concentration approach
• Numerical simulations of nonlocal phase-field and hyperbolic nonlocal phase-field models via localized radial basis functions-based pseudo-spectral method (LRBF-PSM)
• Asymptotic behavior of solutions for a free boundary problem with a nonlinear gradient absorption
• A mathematical model for wet-chemical diffusion-controlled mask etching through a circular hole
• A conserving discretization for the free boundary in a two-dimensional Stefan problem
• Dynamics and spreading speed of a reaction-diffusion system with advection modeling West Nile virus
• scientific article; zbMATH DE number 922732 (Why is no real title available?)
• Chemical Attack in Free Boundary Domains
• Global existence and blowup analysis to single-species bacillus system with free boundary
• Numerical study on photoresist etching processes based on a cellular automata model
• A fixed-grid approach for diffusion- and reaction-controlled wet chemical etching
• A numerical analysis of calendering
• Domain decomposition and heterogeneous modeling used in solving a moving boundary problem
• A comparison of numerical models for one-dimensional Stefan problems
• Numerical solution of moving boundary problems using a new hybrid grid and meshless method

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