Numerical solution of an etching problem
Heat equation (35K05) Variational inequalities (49J40) Numerical optimization and variational techniques (65K10) Numerical solution of discretized equations for boundary value problems involving PDEs (65N22) Applications to the sciences (65Z05) Chemical kinetics in thermodynamics and heat transfer (80A30)
After a short description of the chemical background of etching processes, a simplified mathematical model is formulated. This contains two parameters that determine the etching profile. Two approaches for obtaining a numerical solution are discussed. First, the problem in terms of a variational inequality is reformulated and some new results on its numerical solution are presented. Then, how the problem can be solved by means of a moving grid method as well is explored. Results obtained by both methods are presented and compared. The latter method is applicable to a much wider class of boundary conditions, but the variational inequality approach seems attractive for other reasons. Finally this work is compared with some experimental results.
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