The Level Set Method for Etching and Deposition

DOI10.1142/S0218202597000578MaRDI QIDQ4376534zbMATH OpenOpenAlexFDO

Authors

Publication date 16 November 1999

Published in M\(^3\)AS. Mathematical Models \& Methods in Applied Sciences (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1142/s0218202597000578

zbMATH Keywords

existence of a viscosity solution

Mathematics Subject Classification ID

Initial value problems for nonlinear first-order PDEs (35F25) Free boundary problems for PDEs (35R35) PDEs with multivalued right-hand sides (35R70)

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Cited in

(8)

• Numerical solution of an etching problem
• An analytical solution for mechanical etching of glass by powder blasting
• A level set approach to a unified model for etching, deposition, and lithography. I: Algorithms and two-dimensional simulations
• A Mathematical Model for the Mechanical Etching of Glass
• A level set method for thin film epitaxial growth
• Sparse field level set method for non-convex Hamiltonians in 3D plasma etching profile simulations
• A free boundary problem for a Hamilton-Jacobi equation arising in ion etching
• Amorphous surface growth via a level set approach

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