No label defined (Q4893264)
From MaRDI portal
 | This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: Publication:4893264 |
scientific article; zbMATH DE number 922732
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
||
| English | No label defined |
scientific article; zbMATH DE number 922732 |
Statements
8 December 1996
0 references
semiconductor fabrication
0 references
wet chemical etching
0 references
manufacturing of microelectronic devices
0 references
variational inequality
0 references
iterative numerical scheme
0 references
parallel computer
0 references
numerical results
0 references
0.7226800322532654
0 references
0.686988115310669
0 references
