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scientific article; zbMATH DE number 922732
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| English | No label defined |
scientific article; zbMATH DE number 922732 |
Statements
8 December 1996
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semiconductor fabrication
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wet chemical etching
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manufacturing of microelectronic devices
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variational inequality
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iterative numerical scheme
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parallel computer
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numerical results
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0.7226800322532654
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0.686988115310669
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