Frequency shift prediction of a shear mode multi-layered FBAR sensor in viscous media using transfer matrix method (Q821831)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Frequency shift prediction of a shear mode multi-layered FBAR sensor in viscous media using transfer matrix method |
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Frequency shift prediction of a shear mode multi-layered FBAR sensor in viscous media using transfer matrix method (English)
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21 September 2021
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frequency equation
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shear mode
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frequency shift
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electrode effect
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\(c\)-axis tilted multi-layered FBAR
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viscous media
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