Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities.
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Publication:5925913
DOI10.1016/S0005-1098(00)00084-4zbMath1077.93524MaRDI QIDQ5925913
Edgar, Thomas F., Butler, Stephanie W., Pfeiffer, Carlos, Hahn, J., Balakrishnan, K. S., Hwang, Sung Bo, Campbell, W. Jarrett, Bode, Christopher
Publication date: 2000
Published in: Automatica (Search for Journal in Brave)
End point controlFactory automationMicroelectronics manufacturingPredictive controlProcess controlQuality controlSensorsTemperature control
Control/observation systems involving computers (process control, etc.) (93C83) Application models in control theory (93C95)
Related Items (4)
Multiple-input dual-output adjustment scheme for semiconductor manufacturing processes using a dynamic dual-response approach ⋮ Thermal budget control for processes with spike-shaped temperature profiles: Application to rapid thermal annealing ⋮ Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework ⋮ Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook
Cites Work
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