Two-dimensional adaptive simulation of dopant diffusion in silicon
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Publication:5933368
DOI10.1007/s007910000045zbMath0992.82510OpenAlexW2070273294MaRDI QIDQ5933368
Publication date: 4 June 2001
Published in: Computing and Visualization in Science (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s007910000045
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