Two-dimensional adaptive simulation of dopant diffusion in silicon (Q5933368)
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scientific article; zbMATH DE number 1598425
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| English | Two-dimensional adaptive simulation of dopant diffusion in silicon |
scientific article; zbMATH DE number 1598425 |
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Two-dimensional adaptive simulation of dopant diffusion in silicon (English)
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4 June 2001
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0.765885591506958
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0.7629427313804626
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