Validation of PML-based models for the evaluation of anchor dissipation in MEMS resonators

DOI10.1016/j.euromechsol.2012.06.008zbMath1347.74069OpenAlexW2033028035MaRDI QIDQ324518

Mohammad Hasan, M. Dambrine

Publication date: 17 October 2016

Published in: European Journal of Mechanics. A. Solids (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.euromechsol.2012.06.008

zbMATH Keywords

PMLMEMSresonatorsanchor losseswave dissipation

Mathematics Subject Classification ID

Control, switches and devices (``smart materials) in solid mechanics (74M05)

Related Items (1)

A fast boundary-finite element approach for estimating anchor losses in micro-electro-mechanical system resonators

Uses Software

• Gmsh
• ARPACK

Cites Work

• Solid damping in micro electro mechanical systems
• Absorbing PML boundary layers for wave-like equations
• A perfectly matched layer for the absorption of electromagnetic waves
• Perfectly matched layers for time-harmonic elastodynamics of unbounded domains: theory and finite element implementation.
• FICTITIOUS DOMAINS, MIXED FINITE ELEMENTS AND PERFECTLY MATCHED LAYERS FOR 2-D ELASTIC WAVE PROPAGATION
• Comparison of high-order absorbing boundary conditions and perfectly matched layers in the frequency domain
• Forced vibrations of a rigid circular plate on a semi-infinite elastic space and on an elastic stratum
• Elastic PMLs for resonator anchor loss simulation
• Gmsh: A 3-D finite element mesh generator with built-in pre- and post-processing facilities
• The Perfectly Matched Layer in Curvilinear Coordinates
• ARPACK Users' Guide
• Complex space approach to perfectly matched layers: a review and some new developments
• On the evaluation of damping in MEMS in the slip-flow regime
• The field and radiation impedance of mechanical radiators on the free surface of a semi-infinite isotropic solid

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