Size effect on the static behavior of electrostatically actuated microbeams (Q362909)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Size effect on the static behavior of electrostatically actuated microbeams |
scientific article |
Statements
Size effect on the static behavior of electrostatically actuated microbeams (English)
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30 August 2013
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electrostatically actuated microbeam
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size effect
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deflection
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pull-in voltage
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MEMS
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