An inverse heat transfer method to provide near-isothermal surface for disc heaters used in microlithography

DOI10.1016/j.ijheatmasstransfer.2006.04.019zbMath1113.80326OpenAlexW2058457567MaRDI QIDQ856629

Satish Karra, Arunn Narasimhan

Publication date: 7 December 2006

Published in: International Journal of Heat and Mass Transfer (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.ijheatmasstransfer.2006.04.019

zbMATH Keywords

inverse heat transferscale analysissilicon wafermicrolithographypost-exposure baketemperature uniformity

Mathematics Subject Classification ID

Inverse problems in thermodynamics and heat transfer (80A23)

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