Solving partial differential equations on irregular domains with moving interfaces, with applications to superconformal electrodeposition in semiconductor manufacturing
From MaRDI portal
Publication:933314
DOI10.1016/j.jcp.2008.03.001zbMath1141.82345MaRDI QIDQ933314
Publication date: 21 July 2008
Published in: Journal of Computational Physics (Search for Journal in Brave)
Full work available at URL: https://digital.library.unt.edu/ark:/67531/metadc893148/
multigrid methods; level set methods; conservative material level set methods; immersed interface methods; semiconductor process; superconformal electrodeposition
82D37: Statistical mechanics of semiconductors
65M55: Multigrid methods; domain decomposition for initial value and initial-boundary value problems involving PDEs
82C24: Interface problems; diffusion-limited aggregation in time-dependent statistical mechanics
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Cites Work
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