Solving partial differential equations on irregular domains with moving interfaces, with applications to superconformal electrodeposition in semiconductor manufacturing

DOI10.1016/J.JCP.2008.03.001zbMath1141.82345OpenAlexW2123377007MaRDI QIDQ933314

Ying Shan, James A. Sethian

Publication date: 21 July 2008

Published in: Journal of Computational Physics (Search for Journal in Brave)

Full work available at URL: https://digital.library.unt.edu/ark:/67531/metadc893148/

zbMATH Keywords

multigrid methodslevel set methodsconservative material level set methodsimmersed interface methodssemiconductor processsuperconformal electrodeposition

Mathematics Subject Classification ID

Statistical mechanics of semiconductors (82D37) Multigrid methods; domain decomposition for initial value and initial-boundary value problems involving PDEs (65M55) Interface problems; diffusion-limited aggregation in time-dependent statistical mechanics (82C24)

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Uses Software

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Cites Work

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