A dual-mixed hybrid formulation for fluid mechanics problems: Mathematical analysis and application to semiconductor process technology

DOI10.1016/S0045-7825(02)00574-1zbMath1026.74068OpenAlexW2163514936MaRDI QIDQ1400232

Paola Causin, Riccardo Sacco

Publication date: 13 August 2003

Published in: Computer Methods in Applied Mechanics and Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/s0045-7825(02)00574-1

zbMATH Keywords

optimal error estimatesstress fieldthermal oxidationdual-mixed-hybrid formulationlocal oxidation structuresemiconductor technology

Mathematics Subject Classification ID

Finite element methods applied to problems in solid mechanics (74S05) Statistical mechanics of superconductors (82D55)

Related Items (7)

Global weak solutions for an incompressible charged fluid with multi-scale couplings: initial-boundary-value problem ⋮ The steady boundary value problem for charged incompressible fluids: PNP/Navier-Stokes systems ⋮ On inf-sup conditions and projections in the theory of mixed finite-element methods ⋮ A time-filtering method for plasma simulation: high bulk conductivity ⋮ Discretization of Poisson's equation in two domains with non algebraic interface conditions for plasma simulations ⋮ Numerical simulation of tethered buoy dynamics using mixed finite elements ⋮ A posteriori dual-mixed adaptive finite element error control for Lamé and Stokes equations

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