A dual-mixed hybrid formulation for fluid mechanics problems: Mathematical analysis and application to semiconductor process technology

DOI10.1016/S0045-7825(02)00574-1zbMath1026.74068MaRDI QIDQ1400232

Paola Causin, Riccardo Sacco

Publication date: 13 August 2003

Published in: Computer Methods in Applied Mechanics and Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/s0045-7825(02)00574-1

zbMATH Keywords

optimal error estimates; stress field; thermal oxidation; dual-mixed-hybrid formulation; local oxidation structure; semiconductor technology

Mathematics Subject Classification ID

74S05: Finite element methods applied to problems in solid mechanics

82D55: Statistical mechanics of superconductors

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