A dual-mixed hybrid formulation for fluid mechanics problems: Mathematical analysis and application to semiconductor process technology (Q1400232)

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A dual-mixed hybrid formulation for fluid mechanics problems: Mathematical analysis and application to semiconductor process technology
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    A dual-mixed hybrid formulation for fluid mechanics problems: Mathematical analysis and application to semiconductor process technology (English)
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    13 August 2003
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    dual-mixed-hybrid formulation
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    optimal error estimates
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    stress field
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    thermal oxidation
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    semiconductor technology
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    local oxidation structure
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