A dual-mixed hybrid formulation for fluid mechanics problems: Mathematical analysis and application to semiconductor process technology
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Publication:1400232
DOI10.1016/S0045-7825(02)00574-1zbMath1026.74068MaRDI QIDQ1400232
Publication date: 13 August 2003
Published in: Computer Methods in Applied Mechanics and Engineering (Search for Journal in Brave)
optimal error estimates; stress field; thermal oxidation; dual-mixed-hybrid formulation; local oxidation structure; semiconductor technology
74S05: Finite element methods applied to problems in solid mechanics
82D55: Statistical mechanics of superconductors
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