Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis

DOI10.1023/A:1022914020076zbMath1113.74405OpenAlexW174688274MaRDI QIDQ1415684

D. Massart

Publication date: 9 December 2003

Published in: Nonlinear Dynamics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1023/a:1022914020076

zbMATH Keywords

nonlinear modal analysisclamped-clamped micro beamsmicro switch

Mathematics Subject Classification ID

Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Control, switches and devices (``smart materials) in solid mechanics (74M05)

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