Piezoelectric resonators with mechanical damping and resistance in current conduction (Q2462896)

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Piezoelectric resonators with mechanical damping and resistance in current conduction
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    Piezoelectric resonators with mechanical damping and resistance in current conduction (English)
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    5 December 2007
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    quality factor
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    energy sink
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    MEMS
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    mechanical dissipation and viscosity
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    electrical conductivity
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    piezoelectric materials
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