Analysis of static charge induced pull-in of an electrostatic MEMS
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Publication:2656050
DOI10.1016/j.cnsns.2021.105690zbMath1466.78015OpenAlexW3119440455MaRDI QIDQ2656050
Banibrata Mukherjee, Mithlesh Kumar, Siddhartha Sen
Publication date: 10 March 2021
Published in: Communications in Nonlinear Science and Numerical Simulation (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.cnsns.2021.105690
electrostatic actuationcantileverfixed-free beamclamped-clamped beamcharge induced pull-inpartial electrode actuationstatic charge
Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10) Technical applications of optics and electromagnetic theory (78A55) Electro- and magnetostatics (78A30)
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